一种低频高灵敏度压电MEMS声接收器设计

Design of a Low-Frequency High-Sensitivity Piezoelectric MEMS Acoustic Receiver

摘要:

为了提高低频段的灵敏度,基于ScAlN薄膜设计了一种开缝式低频高灵敏度MEMS声传感器结构, 并分析了开缝数量对谐振频率和电压输出的影响规律。制作微机电系统(MEMS)声接收器样品,当谐振频率为 29.3 kHz时,在20~30 kHz内测得其最高灵敏度高于-60 dB,说明所提出的开缝式结构能在低频段实现高灵敏度。

Abstract:

To enhance the sensitivity in the low-frequency range, a slotted low-frequency high-sensitivity micro electromechanical systems (MEMS) acoustic sensor structure was designed based on scandium aluminum nitride (ScAlN) piezoelectric films. The influence of the number of slots on the resonant frequency and voltage output was analyzed. A MEMS acoustic receiver with a resonant frequency of 29.3 kHz was fabricated. The highest sensitivity measured within the frequency range of 20-30 kHz exceeded -60 dB, indicating that the slotted structure proposed in this paper could achieve high sensitivity in the low-frequency range.