基于热传导的高鲁棒性温压一体柔性传感器敏感机理的研究

Mechanism of High-Robustness Flexible Sensor for Temperature and Pressure Integration Based on Heat Conduction

摘要:

该文提出了一种基于热传导的高鲁棒性温压一体柔性传感器结构,并研究了其敏感机理。通过 COMSOL建立三维模型结构,计算了敏感结构内的温度场。计算结果表明,基于热传导的高鲁棒性温压一体柔性传感器的输入压强与输出电压成反比例关系,当压强为0~500 kPa时,传感器灵敏度为-0.205 mV/kPa,非线性度为6.161%;当压强为525~740 kPa时,传感器灵敏度为-4.937 mV/kPa,非线性度为9.628%。

Abstract:

In this paper, we propose a high-robustness, temperature-pressure integrated flexible sensor based on heat conduction and analyze its underlying mechanism. A three-dimensional model was established using COMSOL, and the temperature field in the structure was calculated. The results show that the input pressure is inversely pro portional to the output voltage of the proposed sensor. The sensitivity is -0.205 mV/kPa in the range of 0-500 kPa with a nonlinearity of 6.161%. Likewise, the sensitivity is -4.937 mV/kPa in the range of 525-740 kPa with a nonlinearity of 9.628%. We describe the underlying mechanism of the sensor, providing a theoretical foundation for optimizing its parameters and structure.