多层PZT陶瓷自热温度影响因素分析

Analysis of Factors Affecting Self-Heating Temperature of Multilayer PZT Ceramics

摘要:

多层PZT陶瓷作为压电驱动器的核心组件,其压电性能受自热温度影响,在高交变电压作用下易发生失效。该文从交变电压特性、陶瓷多层结构角度对PZT陶瓷自热温度作用规律展开研究。首先基于扫描电镜下陶瓷断面结构形貌,建立了多层PZT陶瓷细观结构仿真模型;然后搭建了温度测量实验平台,开展陶瓷表面自热温度测量实验进行验证;最后分析了交变电压幅值、频率特性和陶瓷压电层、死层厚度对陶瓷表面自热温度的作用机理。结果表明,陶瓷表面自热温度与交变电压幅值、频率呈近似线性增长;自热温度极值分布在陶瓷表面中心区域和边缘区域,温度差值小于3 ℃;压电层越厚,陶瓷表面自热温度越低;表面自热温度随死层厚度的增加呈先降后增趋势,且在死层厚度约300 μm时达到最低值。该结论为多层PZT陶瓷自热温度调控与工程应用提供了理论依据和实验基础。

Abstract:

As the core component of piezoelectric actuators, the piezoelectric performance of multilayer PZT ce ramics is affected by the self-heating temperature. In addition, multilayer PZT ceramics are prone to failure under strong alternating voltage. This study investigates the factors affecting the self-heating temperature from the per spective of alternating voltage characteristics and multilayer structure of PZT ceramics. First, based on the scanning electron microscope cross-sectional structure morphology, a fine-structure simulation model of multilayer PZT ce ramics was established. Then, a temperature measurement experimental platform was set up to conduct self-heating temperature measurements on the ceramic surface for validation. Finally, the effects of alternating voltage ampli tude, frequency characteristics, piezoelectric layer thickness, and dead layer thickness on the self-heating tempera ture of the ceramic surface were analyzed. The results indicate that 1) the self-heating temperature of the ceramic surface increases linearly with the alternating voltage amplitude and frequency; 2) the extreme value of the self-heat ing temperature is distributed in the center and edge regions of the ceramic surface, and the difference in tempera ture is less than 3 ℃; 3) the thicker the piezoelectric layer is, the lower the self-heating temperature of the ceramic surface is; and 4) the self-heating temperature of the surface decreases with the thickness of the dead layer and rea ches its minimum when the thickness of the dead layer is approximately 300 μm. This study provides a theoretical basis and experimental foundation for regulating the self-heating temperature in multilayer PZT ceramics and sup porting engineering applications.