基于二氧化钒的可重构声表面波谐振器

Tunable Surface Acoustic Wave Resonators Based on Vanadium Dioxide

摘要:

仿真设计了一款新颖的可重构声表面波（SAW）谐振器。该设计将相变材料二氧化钒（VO₂）与谐振器集成在同一芯片上，实现了紧凑的可重构谐振器。利用 VO₂的相变特性，以 VO₂替代 SAW 谐振器的部分电极。通过温度控制 SAW 谐振器中 VO₂电极的工作状态，实现 SAW 谐振器频率在两种不同状态之间的调谐。设计的电极宽度为 1. 15 μm（理论波长 λ 为 4. 6 μm）的可重构谐振器，仿真结果显示其频率可在 472 MHz 和 774 MHz 两种状态下进行调谐，机电耦合系数分别为 7. 1% 和 5. 6%，同时调谐范围高达 302 MHz。为使设计的可重构谐振器具有更优的性能，对可重构谐振器的电极厚度进行参数化仿真，当电极厚度为 0. 12λ 时，SAW 谐振器的机电耦合系数最高，为后续可重构 SAW 滤波器提供了更大的带宽。同时还提出了基于 VO₂的可重构 SAW 谐振器的工艺流程思路，这为设计应用于实际提供了指导。

Abstract:

A novel reconfigurable surface acoustic wave （SAW） resonator has been designed through simulation. The design integrates vanadium dioxide （VO₂）， a phase-change material， with the resonator on a single chip to achieve a compact reconfigurable resonator. By utilizing the phase-change properties of VO₂， portions of the SAW resonator’s electrodes are replaced with VO₂. The operating state of these VO₂ electrodes is thermally controlled， enabling frequency tuning between two different states. With an electrode width of 1. 15 μm （corresponding to a theoretical wavelength λ of 4. 6 μm）， simulation results demonstrate that the reconfigurable resonator’s frequency can be tuned to 472 MHz and 774 MHz， exhibiting electromechanical coupling coefficients of 7. 1% and 5. 6%， respectively， and the tuning range of the resonator peaks at 302 MHz. Parametric simulations of electrode thickness reveal that the SAW resonator attains its highest electromechanical coupling coefficient at 0. 12λ， which facilitates broader bandwidth for subsequent reconfigurable SAW filters. Additionally， we propose a fabrication process for VO₂- based reconfigurable SAW resonators， offering practical design guidance.