空气隙型横向激励薄膜体声波滤波器工艺研究
作者:
作者单位:

中国电子科技集团公司第二十六研究所,重庆 400060

作者简介:

舒平(1983-),男,重庆市人,高级工程师,硕士。

通讯作者:

基金项目:

伦理声明:



Research on the Fabrication of Air-Gap Lateral Excitation XBAR Filters
Author:
Ethical statement:

Affiliation:

The 26th Institute of China Electronics Technology Group Corporation, Chongqing 400060 , China

Funding:

  • 摘要
  • |
  • 图/表
  • |
  • 访问统计
  • |
  • 参考文献
  • |
  • 相似文献
  • |
  • 引证文献
  • |
  • 资源附件
    摘要:

    随着通信技术的发展,对射频前端滤波器的高频化和小型化需求愈发强烈。横向激励薄膜体声波滤波器(XBAR)是一种适用于高频应用的器件,其中空气隙型 XBAR 因结构设计而在高频段表现出优异的性能。通过研究空气隙型 XBAR 的制作工艺与结构特点,研制出空气隙型横向激励薄膜体声波滤波器芯片样品。基于探针测试,该滤波器芯片样品的顶部插入损耗为 1. 27 dB,通带带宽为 808 MHz,通带相对带宽为 15. 9%。这对研究高频、大带宽薄膜体声波滤波器具有重要的参考意义。

    Abstract:

    The rapid development of communication technologies has created growing demand for high-frequency, miniaturized RF front-end filters. Among available solutions, the lateral excitation film bulk acoustic resonator (XBAR) represents an advanced technology specifically designed for high-frequency applications. Notably, air-gap XBAR structures demonstrate exceptional high-frequency performance owing to their unique architectural design. This study systematically investigates both the fabrication processes and structural characteristics of air-gap XBARs. Through this research, we successfully developed a functional air-gap transverse excitation thin-film bulk acoustic wave filter chip sample. Probe testing revealed that the fabricated device achieves a minimum insertion loss of 1. 27 dB, with a passband bandwidth of 808 MHz and a relative passband bandwidth of 15. 9%. These experimental results provide valuable reference data for ongoing research into high-frequency, large-bandwidth thin-film bulk acoustic wave filters.

    参考文献
    相似文献
    引证文献
引用本文

舒平,李桦林,梁柳洪,谭发曾,冷峻林,陈兴.空气隙型横向激励薄膜体声波滤波器工艺研究[J].压电与声光,2025,47(2):220-224. SHU Ping, LI Hualin, LIANG Liuhong, TAN Fazeng, LENG Junlin, CHEN Xing. Research on the Fabrication of Air-Gap Lateral Excitation XBAR Filters[J]. PIEZOELECTRICS AND ACOUSTOOPTICS

复制
分享
文章指标
  • 点击次数:
  • 下载次数:
  • HTML阅读次数:
历史
  • 收稿日期:2024-12-07
  • 最后修改日期:
  • 录用日期:
  • 在线发布日期: 2025-06-03
  • 出版日期: