基于氧化石墨烯的高灵敏DMMP声表面波传感器

Graphene Oxide Coated SAW Sensor for Highly Sensitive DMMP Detection

摘要:

以沙林的模拟物甲基磷酸二甲酯（DMMP）为检测对象，开发了一种基于氧化石墨烯（GO）的声表面波 （SAW）DMMP 气体传感器。该传感器利用半导体平面工艺在石英基底上沉积金属铝换能器，形成延迟线结构，并通过滴涂法在声传播路径上沉积 GO 气敏薄膜。在室温条件下，该 SAW 传感器在 1 ppm 至 40 ppm 的 DMMP 浓度范围内展现出高灵敏度（0. 6 mV/ppm）和快速响应（T₉₀= 45 s）。此外，该传感器具有较好的稳定性，放置两周后其传感性能衰退较小。

Abstract:

This study focuses on the detection of dimethyl methylphosphonate （DMMP）， a simulant of sarin， and presents the development of a graphene oxide （GO）-based surface acoustic wave （SAW） gas sensor for DMMP detection. The sensor is fabricated using semiconductor planar technology， wherein a metal aluminum transducer is deposited onto a quartz substrate to form a delay line structure. Additionally， a GO gas-sensitive film is applied along the acoustic wave propagation path using a drop-coating method. At room temperature， the SAW sensor demonstrates high sensitivity （0. 6 mV/ppm） and a rapid response time （T₉₀ = 45 s） over a DMMP concentration range of 1 ppm to 40 ppm. Furthermore， the sensor exhibits good stability， with negligible performance degradation observed after two weeks of storage.